Gigaphoton Installs KrF Excimer Laser to Advance High-Temperature Superconducting Wire Manufacturing
The L300KZ laser is being evaluated for PLD thin-film deposition as part of Japan’s Moonshot Goal 10 programme, supporting efforts to establish high-quality, cost-efficient production of REBCO superconducting wire.
Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for leading-edge semiconductor fabrication processes, announced that it has installed its L300KZ KrF excimer laser for pulsed laser deposition (PLD) at a domestic manufacturer of high-temperature superconducting wire on September 25, 2026. Developed under Goal 10 of Japan’s Moonshot Research and Development Program, which is administered by the Cabinet Office, the laser evaluation has begun for volume manufacturing of high-temperature superconducting wire.
Gigaphoton is one of the participating institutions in the Moonshot Goal 10 R&D project under “Fundamental Superconducting Technology to Realize Various Innovative Fusion Reactor Concepts.” (Grant Number JPMJMS24A2). The project aims to establish high-quality, low-cost mass-production technology for high-performance rare-earth barium copper oxide (*REBCO) wire, an important component material for superconducting magnets used in fusion reactors. Within the project, Gigaphoton is responsible for developing excimer lasers used in PLD processes. The L300KZ installed for this evaluation is a high-pulse-energy laser for PLD thin-film deposition of high-temperature superconducting materials, developed by applying technologies cultivated through Gigaphoton’s excimer lasers for semiconductor lithography.
Among lightsources used in PLD processes, excimer lasers offer high-pulse energy and are widely used to form high-quality thin films. The company is applying technologies developed through its extensive experience in excimer lasers for semiconductor lithography, including technologies that support stable operation and high availability. Gigaphoton aims to contribute to future improvements in productivity and equipment availability in PLD processes.
With this installation, the project will move into the evaluation phase in an actual PLD thin-film deposition process environment. In collaboration with the project’s related organizations, Gigaphoton will verify the relationship between laser operating conditions and the deposition process, which will contribute to quality improvements in high-temperature superconducting wire and the establishment of high-volume production technology.
Tatsuo Enami, President and CEO of Gigaphoton, said, “Installing an excimer laser for PLD in an actual thin-film deposition process environment and starting the evaluation phase mark important steps for Gigaphoton. In addition to high-temperature superconducting wire, we are looking ahead to applications in a broad range of advanced materials fields where PLD technology is used, including functional thin films, advanced electronic materials, and optical materials. Through continued collaboration with related organizations, Gigaphoton will contribute to the establishment of mass-production technology for high-temperature superconducting wire, while working to create new value in the advanced materials industries.”
