Shanghai Chengwei Launches High-Purity Chemical Delivery Systems for Advanced Manufacturing
New automated distribution and point-of-use systems combine high-purity materials, precision monitoring and dual-containment safety to support reliable chemical delivery across semiconductor fabs, displays and photovoltaics.
Shanghai Chengwei Semiconductor Equipment has announced the global commercial launch of new high-purity chemical delivery and bulk chemical distribution systems designed for advanced semiconductor manufacturing. The company said the systems are intended to support stringent contamination-control requirements in semiconductor fabs, as well as flat-panel display and photovoltaic production facilities.
The bulk chemical distribution system is designed to transport process chemicals from central storage facilities directly to production equipment, replacing manual movement of chemical containers within fabs. The company said this approach can improve handling safety while maintaining consistent chemical delivery during manufacturing operations.
Alongside the distribution system, Chengwei's chemical delivery module provides automated mixing, filtration and point-of-use dispensing. The equipment uses high-purity materials such as PTFE and PFA for chemical-contact components, with the aim of reducing contamination, chemical degradation and particle generation.
The systems incorporate automation and monitoring features, including programmable logic controllers, ultrasonic flow measurement and pressure-control equipment. These functions are designed to regulate chemical dilution and delivery while providing real-time operating data for facility management systems.
Safety is another focus of the new equipment. The chemical delivery module uses dual-containment piping with leak-detection sensors and automatic isolation valves. Chengwei said the design can detect a failure in the primary chemical line and stop the flow, while the secondary containment system helps prevent the release of hazardous chemicals.
The company manufactures its systems at a 4,000-square-metre facility in Shanghai, including a 500-square-metre Class 100 cleanroom where key assembly, welding and integration processes are carried out under controlled particle conditions.
Shanghai Chengwei was established in 2025 and supplies high-purity gas, chemical and slurry delivery equipment for semiconductor, PCB, display, solar and other advanced manufacturing applications. Its product portfolio includes chemical delivery modules, slurry systems, gas cabinets and valve manifold boxes.
